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GTP Filter Cartridges (E-PFA)

Gas Filter Cartridge for Semiconductor Processed Gases

GTP Filter Cartridges designed especially for use in semiconductor processed gas filtration. They utilize expanded PTFE membrane and PFA core and cage, which are high-temperature and oxidation resistant. The high-density pleated design guarantees high flow rates with low-pressure drop.


Features and Benefits


High-temperature & Oxidation Resistant

Expanded PTFE membrane and PFA core & cage provide superior resistance during semiconductor filtration process.


Effective Filter Area

High-density pleated technology provides ultra-large filter area.


Precise Removal Ratings

PTFE membrane provides absolute removal rating of 0.003μm to meet stricter requirements


High Flow Rates & Low Pressure Drop

Inherently hydrophobic PTFE membrane provides exceptionally high flow rates with low-pressure drop.


100% Integrity Test




Characteristics


Filter MediumPTFE
Core / Cage / End CapsPFA
Max. Operating Temperature170 ℃
Max. Different Pressure4.0 bar /21℃
3.0 bar / 110℃
1.3 bar / 170℃





Ordering Information

    Removal Ratings   End CapNominal LengthSeal Material  

GTP       

00003=0.003μmTC=222 / Flat 05= 5"P=FEP-E 

 

0001=0.01μm
10= 10"



0010=0.2μm





0020=0.2μm




















 







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