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Home | Industries | Microelectronics| SEM-Grade Chemicals Filtration Solutions

SEM-Grade Chemicals Filtration Solutions

High Precision All Fluorine Filter Cartridges

SEM-PFA Filter Cartridges are composed of high-purity PFA 440HP. The all-fluorine structure provides high temperature tolerance and corrosion resistance which are good features for electronic grade chemical filtration.

Precise Pore Sizes

Available in 0.02μm, 0.05μm, and 0.1μm pore sizes for use in the semiconductor industry.

All-Fluorine Structure

A high-purity PFA 440HP structure ensures low extractable.

Pre-Wetting Packaging

Available in pre-wetted package for easy use.

Excellent Chemical Compatibility

A PTFE membrane combined with PFA structure results in a filter with high temperature and corrosion resistance.

Operating Conditions

Filter Media	PTFE
End cap /Core/Cage	PFA
Max. Operating Temperature	170°C
Max. Differential Pressure	0.4 MPa / 21°C 0.24 MPa / 80°C
Metal Ion Leach	<1ppb
TOC Leach	<10ppb
Particle Flush	0.2μm particles<10 grains/CC
Filter Area	1.08 m² / 10 inch