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Home | Flat Panel Display | Gas Solution| GTP Filter Cartridges (E-PFA)
GTP Filter Cartridges (E-PFA)
Gas Filter Cartridge for Semiconductor Processed Gases
GTP Filter Cartridges designed especially for use in semiconductor processed gas filtration. They utilize expanded PTFE membrane and PFA core and cage, which are high-temperature and oxidation resistant. The high-density pleated design guarantees high flow rates with low-pressure drop.
Expanded PTFE membrane and PFA core & cage provide superior resistance during semiconductor filtration process.
High-density pleated technology provides ultra-large filter area.
PTFE membrane provides absolute removal rating of 0.003μm to meet stricter requirements
Inherently hydrophobic PTFE membrane provides exceptionally high flow rates with low-pressure drop.
Filter Medium | PTFE |
Core / Cage / End Caps | PFA |
Max. Operating Temperature | 170 ℃ |
Max. Different Pressure | 4.0 bar /21℃ 3.0 bar / 110℃ 1.3 bar / 170℃ |
Removal Ratings | End Cap | Nominal Length | Seal Material | |||
GTP | 00003=0.003μm | TC=222 / Flat | 05= 5" | P=FEP | -E | |
| 0001=0.01μm | 10= 10" | ||||
0010=0.2μm | ||||||
0020=0.2μm | ||||||
Contact Form
Hangzhou Cobetter Filtration Equipment Co.,Ltd
Tel
86-571-87704359(English)
86-571-87704270(Japanese)
sale@cobetterfilter.com
Sales
19/F, Building B, Huanyu Business Center, No.626 Kejiguan Road Binjiang District, Hangzhou 310052, China
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Heshang Industry Section,Xiaoshan,Hangzhou 310053,China
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