Home | Semiconductors | Wet Chemical| Chemphobic Ultrapure Chemical Filter

Chemphobic Ultrapure Chemical Filter

All fluorine construction makes it suitable for the filtration of highly corrosive high temperature chemicals including SPM/H3PO4/IPA. 


Available in removal ratings from 7nm-50nm to meet all the requirements of ultra-pure chemical filtration.


Filter's cleanliness reduces equipment pre-operation time.


One-piece structural design makes it easy to install and replace this filter capsule.


Ultra-low metal extractables.












Product Specification


CartridgeCapsule
Filter MediumPTFEPTFE
Core/Cage/End CapsPFAPFA
Max. Operating Temperature170°C170°C
Max. Different Pressure0.58MPa@25°C0.49MPa@25°C







DOWNLOAD

Contact Form