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Photopex UPE

With retention ratings from 1nm to 5μm, Cobetter PhotopexTM UPE Filter Cartridges ensure excellent retention capabilities, cleanliness and high chemical compatibility to meet the critical demands in semiconductor processes.


Using its superior cleaning method, the high purity PE structure ensures cleanliness, low particle shedding and eliminates contaminants, thereby improving removal efficiency. In addition, the filter's large surface area provides high flow rates and extended service life.


Available in a wide variety of sizes and configurations to meet all your requirements. Please contact your Cobetter Sales Engineer for additional information.



Application

Photoresist Filtration

Solvent Filtration

Photochemical Filtration

Wet Clean



Features and Benefits 

Higher Efficiency

Higher Chemical Compatibility

Better Initial Cleanliness

Ultra-low Metal and Organic Extractables






Product Specification


 Cartridge
Capsule
Filter Membrane Hydrophobic UPE


Cage/Core/End CapsHDPE 



O-ring

TEV or EPDM



Shell （Capsule only）HDPE 



Max. Operating Temperature60°C

38°C 


Max. Operating Pressure0.34 MPa @ 25°C
0.34 MPa @ 25°C
Filter AreasX1 (ø68mm)X2 (ø68mm)Z1 (ø83mm)Z1 (ø83mm)

1.3 m²/10"1.8 m²/10"1.9 m²/10"2.6 m²/10"




Ordering Information



Catridge

PPU12OTC3456



Block 1Block 2Block 3Block 4Block 5Block 6

Diameter

Removal Ratings    

Nominal Length

O-ring MaterialCleanlinessPackage 

X1=ø68mm

X2=ø68mm

Z1=ø83mm

Z2=ø83mm





NM01=1nm

NM02=2nm

NM03=3nm

NM05=5nm

NM10=10nm

NM20=20nm

NM30=30nm

NM50=50nm

0010=0.1μm

0020=0.2μm


04=4"

10=10"

20=20"

P=TEV

E=EPDM

UU= Super clean grade

UH= High clean grade

U= Semicon grade

E= Electronic grade

D=Dry

W=Prewet, UPW



Capsule

PPU1234



Block 1Block 2

Block 3Block 4

Removal Ratings 

Fitting Type

Inlet/Outlet

Vent/Drain

O-ring MaterialPackage 

NM01=1nm

NM02=2nm

NM03=3nm

NM05=5nm

NM10=10nm

NM20=20nm

NM30=30nm

NM50=50nm

0010=0.1μm

0020=0.2μm



SW43E=SW

SW44E=SW

SW984E=SW

PL54LE=CPL

PL54ME=CPL

NPT42E=NPT

FL64E=CFL






1/4"

1/4"

1/2"

8mm

8mm

1/4"

3/8"



4mm

1/4"

1/4"

4mm

4mm

1/8"

1/4"





UU= Super clean grade

UH= High clean grade

U= Semicon grade

E= Electronic grade


D=Dry

W=Prewet, UPW





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Contact Form

Hangzhou Cobetter Filtration Equipment Co.,Ltd

Tel

86-571-87704359（English）

86-571-87704270（Japanese）

E-mail

sale@cobetterfilter.com

Sales

19/F, Building B,  Huanyu Business Center, No.626 Kejiguan Road Binjiang District, Hangzhou 310052, China

Factory

Heshang Industry Section,Xiaoshan,Hangzhou 310053,China

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